Electrostatic BEM for MEMS with thin beams

Communications in Numerical Methods in Engineering

Volumn 21, Issue 6, 2005, Pages 297-312

  Bao, Zhongping ^a   Mukherjee, Subrata ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

Boundary element method; Boundary integral equations; Micro electro mechanical systems; Nearly singular integrals; Singular integrals; Thin beams; Thin curved beams

Indexed keywords

ELECTRIC CONDUCTORS; ELECTRIC FIELDS; ELECTROSTATICS; INTEGRAL EQUATIONS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; PLATES (STRUCTURAL COMPONENTS);

BOUNDARY INTEGRAL EQUATION (BIE); NANO-ELECTRO-MECHANICAL (NEM) SYSTEMS; SURFACE TRACTIONS; THIN BEAMS;

BOUNDARY ELEMENT METHOD;

BOUNDARY ELEMENT METHOD; ELECTROSTATICS;

EID: 20444468750     PISSN: 10698299     EISSN: None     Source Type: Journal    
DOI: 10.1002/cnm.748     Document Type: Article

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