Electrostatic BEM for MEMS with thin conducting plates and shells

Engineering Analysis with Boundary Elements

Volumn 28, Issue 12, 2004, Pages 1427-1435

  Bao, Zhongping ^a   Mukherjee, Subrata ^a  

^a Cornell University ^*  (United States)

Author keywords

Boundary element method; Boundary integral equations; Micro electro mechanical systems; Nearly singular integrals; Singular integrals; Thin plates; Thin shells

Indexed keywords

BOUNDARY ELEMENT METHOD; CAPACITORS; COMPUTATIONAL METHODS; INTEGRAL EQUATIONS; PLATES (STRUCTURAL COMPONENTS); SHELLS (STRUCTURES);

BOUNDARY INTEGRAL EQUATIONS (BIE); NEARLY SINGULAR INTEGRALS; SINGULAR INTEGRALS; THIN PLATES; THIN SHELLS;

MICROELECTROMECHANICAL DEVICES;

EID: 8344274343     PISSN: 09557997     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enganabound.2004.07.001     Document Type: Article

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