BEM modeling of damping forces on MEMS with thin plates

Engineering Analysis with Boundary Elements

Volumn 29, Issue 11, 2005, Pages 1000-1007

  Mukherjee, Subrata ^a   Telukunta, Srinivas ^b   Mukherjee, Yu Xie ^c  

^a Department of Obstetrics Gynecology   (United States)

^b Cornell University   (United States)

^c Avant Analysis Technology   (United States)

Author keywords

Boundary element method (BEM); Damping forces; Micro electro mechanical systems (MEMS); Stokes flow; Thin plates

Indexed keywords

BOUNDARY ELEMENT METHOD; DAMPING; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; PLATES (STRUCTURAL COMPONENTS); STIFFNESS;

DAMPING FORCES; MICROELECTROMECHANICAL SYSTEMS (MEMS); STOKES FLOW; THIN PLATES;

MICROELECTROMECHANICAL DEVICES;

EID: 27744558164     PISSN: 09557997     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enganabound.2005.05.012     Document Type: Article

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