Computational study of the effect of finger width and aspect ratios for the electrostatic levitating force of MEMS combdrive

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 305-312

  Chyuan, Shiang Woei ^a,b   Liao, Yunn Shiuan ^a   Chen, Jeng Tzong ^c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Aspect ratio; Combdrive; DBEM; Finger width ratio; Levitating force; MEMS

Indexed keywords

ASPECT RATIO; BOUNDARY CONDITIONS; BOUNDARY ELEMENT METHOD; BOUNDARY VALUE PROBLEMS; COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; INTEGRAL EQUATIONS; MATHEMATICAL MODELS;

COMBDRIVE; DUAL BOUNDARY ELEMENT METHOD; FINGER WIDTH RATIO; LEVITATING FORCE;

MICROELECTROMECHANICAL DEVICES;

EID: 18844400833     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839031     Document Type: Article

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