Low surface temperature synthesis and characterization of diamond thin films

Diamond and Related Materials

Volumn 15, Issue 9, 2006, Pages 1336-1349

  Das, D ^a   Jayaseelan, V ^a   Ramamurti, R ^a   Kukreja, R S ^a   Guo, L ^a   Singh, R N ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

Low temperature deposition; Polycrystalline diamond; Silicon; Silicon carbide; Surface temperature; Tensile stress

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION; COOLING; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; PYROMETERS; SYNTHESIS (CHEMICAL); THIN FILMS;

LOW TEMPERATURE DEPOSITION; POLYCRYSTALLINE DIAMOND; SURFACE TEMPERATURE;

DIAMOND FILMS;

EID: 33746662263     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.016     Document Type: Article

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