Microstructure evolution and non-diamond carbon incorporation in CVD diamond thin films grown at low substrate temperatures

Journal of Crystal Growth

Volumn 172, Issue 3-4, 1997, Pages 404-415

  Michler, J ^a   Stiegler, J ^a   Von Kaenel, Y ^a   Moeckli, P ^a   Dorsch, W ^b   Stenkamp, D ^b   Blank, E ^a  

^a EPFL   (Switzerland)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

(Micro)structure; Diamond domain border; Low temperature growth; Re entrant corner growth; TEM; Two dimensional nucleation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); MICROSTRUCTURE; NUCLEATION; RAMAN SPECTROSCOPY; TEMPERATURE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TWINNING; X RAY CRYSTALLOGRAPHY;

DIAMOND DOMAIN BORDER; LOW TEMPERATURE GROWTH; NON DIAMOND CARBON INCORPORATION; REENTRANT CORNER GROWTH;

DIAMOND FILMS;

EID: 0031103779     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00772-5     Document Type: Article

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