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Volumn 58, Issue 24, 2004, Pages 3029-3033

Optical properties of diamond films deposited by low temperature microwave plasma CVD from camphor

Author keywords

Camphor; Chemical vapor deposition; Diamond; Microwave plasma CVD

Indexed keywords

CRYSTAL GROWTH; DIAMONDS; FREONS; MAGNETRON SPUTTERING; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE EFFECTS; QUARTZ; SCANNING ELECTRON MICROSCOPY; SILICON;

EID: 3943077864     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2004.05.035     Document Type: Article
Times cited : (4)

References (27)
  • 20
    • 3943090066 scopus 로고
    • R. Messier, J.T. Glass, J.E. Butler, & R. Roy. Pittsburgh, Washington D. C., 23-27 September, PA: MRS
    • Harris S.T., Belton D.N., Blint R.J., Messier R., Glass J.T., Butler J.E., Roy R. New Diamond Science and Technology, Washington D. C., 23-27 September, 1990. 1991;MRS, Pittsburgh, PA. 277 pp.
    • (1990) New Diamond Science and Technology
    • Harris, S.T.1    Belton, D.N.2    Blint, R.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.