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Volumn 58, Issue 24, 2004, Pages 3029-3033
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Optical properties of diamond films deposited by low temperature microwave plasma CVD from camphor
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Author keywords
Camphor; Chemical vapor deposition; Diamond; Microwave plasma CVD
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Indexed keywords
CRYSTAL GROWTH;
DIAMONDS;
FREONS;
MAGNETRON SPUTTERING;
METHANE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PRESSURE EFFECTS;
QUARTZ;
SCANNING ELECTRON MICROSCOPY;
SILICON;
BAND GAPS;
CAMPHOR;
HYDROTHERMAL GROWTH;
MICROWAVE PLASMA;
DIAMOND FILMS;
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EID: 3943077864
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2004.05.035 Document Type: Article |
Times cited : (4)
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References (27)
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