Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 553-559

  Su, Wang Shen ^a   Lee, Sheng Ta ^a   Lin, Cheng Yu ^a   Tsai, Ming Shih ^b   Yip, Ming Chuen ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Cantilever beam; Curvature; Plasma; Shape

Indexed keywords

COMPUTER SIMULATION; PLASMA THEORY; SILICA; TUNING;

CANTILEVER BEAM; CURVATURE; PLASMA; SHAPE;

MICROMACHINING;

EID: 33745853101     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.010     Document Type: Article

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