AFM characterization of out-of-plane high frequency microresonators

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 135-140

  Ryder, Steve ^a   Lee, Ki Bang ^a   Meng, Xiaofan ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

AFM; Characterization; High frequency; Microresonator; Microsystems; RF MEMS

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; LASER DOPPLER VELOCIMETERS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTICAL MICROSCOPY; PHOTODETECTORS; SCANNING ELECTRON MICROSCOPY;

MICRORESONATORS; MICROSCALE DEVICES; MICROSYSTEMS; PARASITIC CAPACITANCE;

RESONATORS;

EID: 4344683420     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.033     Document Type: Article

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