On the thermal expansion coefficients of thin films

Sensors and Actuators, A: Physical

Volumn 84, Issue 3, 2000, Pages 310-314

  Fang, Weileun ^a   Lo, Chun Yen ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; RESIDUAL STRESSES; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TITANIUM;

COEFFICIENTS OF THERMAL EXPANSION;

THERMAL EXPANSION;

EID: 0034274617     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00311-3     Document Type: Article

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