X-ray scattering study of thermal nanopore templating in hybrid films of organosilicate precursor and reactive four-armed porogen

Nanotechnology

Volumn 17, Issue 14, 2006, Pages 3490-3498

  Yoon, Jinhwan ^a   Heo, Kyuyoung ^a   Oh, Weontae ^b   Jin, Kyeong Sik ^a   Jin, Sangwoo ^a   Kim, Jehan ^a   Kim, Kwang Woo ^a   Chang, Taihyun ^a   Ree, Moonhor ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Dong Eui University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; PHASE SEPARATION; SPIN COATING; THIN FILMS; X RAY SCATTERING;

DIELECTRIC PRECURSOR; FOUR-ARMED POROGEN; HYBRID FILMS; THERMAL NANOPORE TEMPLATING;

NANOSTRUCTURED MATERIALS;

EID: 33745713700     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/14/022     Document Type: Article

References (26)

1. Miller R D 1999 Science 286 421
2. Ree M, Goh W H and Kim Y 1995 Polym. Bull. 35 215
3. Czornyj G, Chen K R, Pradasilva G, Arnold A, Souleotis H, Kim S, Ree M, Volksen W, Dawson D and DiPietro R 1992 Proc. Electron. Comput. Technol. (IEEE) 42 682
4. Semiconductor Industry Association 2004 International Technology Roadmap for Semiconductors San Jose, CA
5. Ree M, Yoon J and Heo K 2006 J. Mater. Chem. 16 685
6. Lee B, Park Y-H, Hwang Y-T, Oh W, Yoon J and Ree M 2005 Nat. Mater. 4 147
7. Huang E et al 2002 Appl. Phys. Lett. 81 2232
8. Lee H-J, Lin E K, Wang H, Wu W-L, Chen W and Moyer E C 2002 Chem. Mater. 14 1845
9. Kim H-C, Volksen W, Miller R D, Huang E, Yang G, Briber R M, Shin K and Satija S K 2003 Chem. Mater. 15 609
10. Nguyen C, Hawker C J, Miller R D, Huang E and Hedrick J L 2000 Macromolecules 33 4281
11. Nguyen C V et al 1999 Chem. Mater. 11 3080
12. Hedrick J L, Miller R D, Hawker C J, Carter K R, Volksen W, Yoon D Y and Trollsas M 1998 Adv. Mater. 10 1049
13. Bolze J, Ree M, Youn H S, Chu S-H and Char K 2001 Langmuir 17 6683
14. Oh W, Hwang Y-T, Park Y H, Ree M, Chu S-H, Char K, Lee J-K and Kim S Y 2003 Polymer 44 2519
15. Lee B, Yoon J, Oh W, Hwang Y, Heo K, Jin K S, Kim J, Kim K-W and Ree M 2005 Macromolecules 38 3395
16. Lee B, Oh W, Hwang Y, Park Y-H, Yoon J, Jin K S, Heo K, Kim J, Kim K-W and Ree M 2005 Adv. Mater. 17 696
17. Lee B, Oh W, Yoon J, Hwang Y, Kim J, Landes B G, Quintana J P and Ree M 2005 Macromolecules 38 8991
18. Oh W, Shin T J, Ree M, Jin M Y and Char K 2002 Macromol. Chem. Phys. 203 791
19. Oh W and Ree M 2004 Langmuir 20 6932
20. Oh W, Shin T J, Ree M, Jin M Y and Char K 2001 Mol. Cryst. Liq. Cryst. 371 397
21. Shin Y C, Choi K-Y, Jin M Y, Hong S-K, Cho D, Chang T and Ree M 2001 Korea Polym. J. 9 100
22. Bolze J, Kim J, Huang J-Y, Rah S, Youn H S, Lee B, Shin T J and Ree M 2002 Macromol. Res. 10 2
23. Lee B, Shin T J, Lee S W, Yoon J, Kim J and Ree M 2004 Macromolecules 37 4174
24. Lee B, Park I, Yoon J, Park S, Kim J, Kim K-W, Chang T and Ree M 2005 Macromolecules 38 4311
25. Kinning D J and Thomas E L 1984 Macromolecules 17 1712
26. Young R J and Lovell P 1991 Introduction to Polymers 2nd edn (London: Chapman and Hall) chapter 3