In-situ grazing incidence small-angle X-ray scattering studies on nanopore evolution in low-k organosilicate dielectric thin films

Macromolecules

Volumn 38, Issue 8, 2005, Pages 3395-3405

  Lee, Byeongdu ^a   Yoon, Jinhwan ^a   Oh, Weontae ^a   Hwang, Yongtaek ^a   Heo, Kyuyoung ^a   Jin, Kyeong Sik ^a   Kim, Jehan ^a   Kim, Kwang Woo ^a   Ree, Moonhor ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DIELECTRIC FILMS; ETHANOL; PHASE SEPARATION; POROSITY; PYROLYSIS; SILICATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY SCATTERING;

DISTORTED WAVE BORN APPROXIMATION (DWBA); POROGENS; PRECURSOR FILMS; TRANSMISSION SMALL-ANGLE X-RAY SCATTERING;

THIN FILMS;

EID: 17444425321     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma048214e     Document Type: Article

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