Synchrotron X-ray reflectivity study on the structure of templated polyorganosilicate thin films and their derived nanoporous analogues

Langmuir

Volumn 17, Issue 21, 2001, Pages 6683-6691

  Bolze, Jörg ^a   Ree, Moonhor ^a   Youn, Hwa Shik ^a   Chu, Sang Hyon ^b   Char, Kookheon ^b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

POROGENS;

CARRIER CONCENTRATION; ELECTROMAGNETIC WAVE REFLECTION; PERMITTIVITY; SILICATES; SILICON WAFERS; SPIN COATING; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; THERMAL EFFECTS; THIN FILMS; X RAYS;

PLASTIC FILMS;

EID: 0035900139     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la010451c     Document Type: Article

References (31)

1. Chiang, S.-K.; Lassen, C.L. Solid State Technol. 1999, 10, 42.
2. Carter, K.R. Ultralow k Workshop; ACS Division of Polymer Chemistry, Monterey, CA, Nov 14-17, 1999.
3. Carter, K.R.; Dawson, D.J.; DiPietro, R.A.; Hawker, J.; Hedrick, J.L.; Miller, R.D.; Yoon, D.Y. U.S. Patent No. 5,895,263, April 20, 1999.
4. Ree, M.; Goh, W.H.; Kim, Y. Polym. Bull. 1995, 35, 215.
5. Hedrick, J.L.; Miller, R.D.; Hawker, C.J.; Carter, K.R.; Volksen, W.; Yoon, D.Y.; Trollsas, M. Adv. Mater. 1998, 10, 1049.
6. Nguyen, C.V.; Carter, K.R.; Hawker, C.J.; Hedrick, J.L.; Jaffe, R.L.; Miller, R.D.; Remenar, J.F.; Rhee, H.-W.; Rice, P.M.; Toney, M.F.; Trollsas, M.; Yoon, D.Y. Chem. Mater. 1999, 11, 3080.
7. Bagley, B.G.; Gallagher, P.K.; Quinn, W.E.; Amos, L.J. Mater. Res. Symp. Proc. 1984, 32, 287.
8. Oh, W.; Shin, T.J.; Ree, M.; Jin, M.Y.; Char, K. Submitted for publication in Chem. Mater.
9. Cook, R.F.; Liniger, E.G. J. Electrochem. Soc. 1999, 146, 4439.
10. Ying, J.Y.; Mehnert, C.P.; Wong, M.S. Angew. Chem., Int. Ed. 1999, 38, 56.
11. Nguyen, C.V.; Hawker, C.J.; Miller, R.D.; Huang, E., Hedrick, J.L.; Gauderon, R.; Hilborn, J.G. Macromolecules 2000, 33, 4281.
12. Lee, J.K.; Char, K.; Chu, S.H.; Yoon, D.Y. Submitted for publication in Chem. Mater.
13. Morgen, M.; Ryan, E.T.; Zhao, J.-H.; Hu, C.; Cho, T.; Ho, P.S. Annu. Rev. Mater. Sci. 2000, 30, 645 and further references given therein.
14. Tolan, M. X-ray scattering from soft matter thin films; Springer-Verlag: Berlin, Heidelberg, 1999.
15. Holy, V.; Pietsch, U.; Baumbach, T. High-resolution X-ray scattering from thin films and multilayers; Springer-Verlag: Berlin, Heidelberg, 1999.
16. Kiessig, H. Ann. Phys. 1931, 10, 769.
17. You, H.; Melendres, C.A.; Nagy, Z.; Maroni, V.A.; Yun, W.; Yonco, R.M. Phys. Rev. B 1992, 45, 11288.
18. Buttard, D.; Dolino, G.,; Bellet, D.; Baumbach, T.; Rieutord, F. Solid State Commun. 1999, 109, 1.
19. Chamard, V.; Dolino, G.; Stettner, J. Physica B 2000, 283, 135.
20. Wu, W.; Wallace, W.E.; Lin, E.K.; Lynn, G.W.; Glinka, C.J.; Ryan, E.T.; Ho; H.M. J. Appl. Phys. 2000, 87, 1193.
21. Wu, W.; Liou, H.-C. Thin Solid Films. 1999, 312, 73.
22. Takamura, N.; Gunji, T.; Hatano, H.; Abe, Y.J. J. Polym. Sci., Part A: Polym. Chem. 1999, 37, 1017.
23. Trollsas, M.; Hedrick, J.L.; Mecerreyes, D.; Dubois, Ph.; Jerome, R.; Ihre, H.; Hult, A. Macromolecules 1997, 30, 8508.
24. Trollsas M.; Hedrick, J.L. J. Am. Chem. Soc. 1897, 19, 4644.
25. Park, B.-J.; Rah, S.-Y.; Park, Y.-J.; Lee, K.-B. Rev. Sci. Instrum. 1995, 66, 1722.
26. Gibaud, A.; Vignaud, G.; Sinha, S.K. Acta Crystallogr. 1993, A49, 642.
27. Parratt, L.G. Phys. Rev. 1954, 95, 359.
28. Névot, L.; Groce, P. Rev. Phys. Appl. 1980, 15, 761.
29. Brinker, C.J.; Scherer, C.W. Sol-Gel Science, Academic: San Diego, 1990.
30. Baney, R.H.; Itoh, M.; Sakakibara, A.; Suzuki, T. Chem. Rev. 1995, 95, 1409.
31. Eisenberg, P.; Erra-Balsells, R.; Ishikawa, Y.; Lucas, J.C.; Mauri, A.N.; Nonami, H.; Riccardi, C.C.; Williams, R.J. Macromolecules 2000, 33, 1940.