Effect of increasing the microwave density in both continuous and pulsed wave mode on the growth of monocrystalline diamond films

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 11, 2005, Pages 2059-2065

  Tallaire, A ^a   Achard, J ^a   Silva, F ^a   Gicquel, A ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH QUALITY DIAMOND SINGLE-CRYSTALS; MICRO-WAVE PLASMA ASSISTED CHEMICAL VAPOUR DEPOSITION; PHOTOLUMINESCENCE SPECTROSCOPY; QUARTZ WINDOWS;

CRYSTALLINE MATERIALS; FILM GROWTH; METHANE; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SINGLE CRYSTALS;

DIAMOND FILMS;

EID: 33745641748     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200561904     Document Type: Conference Paper

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