Synthesis of diamond in high power-density microwave methane/hydrogen/oxygen plasmas at elevated substrate temperatures

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1686-1696

  Chein, Tsan Heui ^a   Wei, Jin ^a   Tzeng, Yonhua ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Diamond; Microwave plasma; Oxygen additive; Power density

Indexed keywords

ADDITIVES; CHEMICAL VAPOR DEPOSITION; DENSITY (SPECIFIC GRAVITY); GROWTH (MATERIALS); HYDROGEN; METHANE; MOLYBDENUM; OXYGEN; PLASMAS; SUBSTRATES; TEMPERATURE;

ELEVATED SUBSTRATE TEMPERATURES; GRAPHITIC DEPOSITS; HIGH POWER DENSITY MICROWAVE PLASMA; NUCLEATION DENSITY;

SYNTHETIC DIAMONDS;

EID: 0032594156     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00059-x     Document Type: Article

References (11)

1. J.J. Lander, J. Morrison, Surf. Sci. 4 (1966) 241.
2. J.C. Angus, in: J.P. Dismukes et al. (Eds.), Proceedings 1st International Symposium on Diamond and Diamond-like Films (1989) 1.
3. N. Fujimori, A. Hara, in: J.P. Dismukes et al. (Eds.), Proceedings 1st International Symposium on Diamond and Diamond-like Films (1989) 1.
4. H. Shiomi, Y. Nishibayashi, H. Nakahata, T. Imai, N. Fujimori, Proceedings of 36th Meeting of the Society of Japan for Applied Physics, (1989)
5. P.K. Bachmann, D. Leers, H. Lydtin, Diamond Relat. Mater. 1 (1991) 1.
6. H.J. Hibshman, US Patent 3 371 996, 1968, filed 1964.
7. Y. Saito, K. Sato, K. Gomi, H. Miyadera, J. Mater. Sci. 25 (1990) 1246.
8. Y. Saito, K. Sato, H. Tanaka, K. Fujita, S. Matuda, J. Mater. Sci. 23 (1988) 842.
9. Y. Hirose, Y. Terasawa, Jpn. J. Appl. Phys. 25 (1986) L519.
10. Y. Liou, A. Inspektor, R. Weimer, D. Knight, R. Messier, J. Mater. Res. 5 (1990) 2305.
11. T. Kawato, K. Kondo, Jpn. J. Appl. Phys. 26 (1987) 1429.