Time-resolved plasma diagnostics for a better understanding of the improvement of pulsed MWPACVD of diamond

Journal of Physics D: Applied Physics

Volumn 34, Issue 6, 2001, Pages 896-904

  De Poucques, L ^a   Bougdira, J ^a   Hugon, R ^a   Henrion, G ^a   Alnot, P ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ETCHING; FILM GROWTH; GRAPHITE; HYDROGEN; MICROWAVES; PLASMA DIAGNOSTICS; THIN FILMS;

DIAMOND PRECURSORS; MICROWAVE PLASMA ASSISTED CHEMICAL VAPOUR DEPOSITION (MWPACVD);

DIAMONDS;

EID: 0035925513     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/6/311     Document Type: Article

References (25)