Investigation of chemical kinetics and energy transfer in a pulsed microwave H2CH4 plasma

Plasma Sources Science and Technology

Volumn 10, Issue 1, 2001, Pages 61-75

  Hassouni, K ^a   Duten, X ^a   Rousseau, A ^b   Gicquel, A ^a  

^a UNIVERSITÉ PARIS 13   (France)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CONCENTRATION (PROCESS); DEPOSITION; ENERGY TRANSFER; HYDROCARBONS; HYDROGEN; PRESSURE; REACTION KINETICS; TEMPERATURE;

BOLTZMANN EQUATION; ELECTRON ENERGY DISTRIBUTION FUNCTION; ELECTRON TRANSLATION MODE; TOTAL ENERGY EQUATION; TUBULAR QUARTZ REACTOR;

PLASMAS;

EID: 0035250464     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/10/1/309     Document Type: Article

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