Energy spectra and charge states of debris emitted from n laser-produced minimum mass tin plasmas

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Fujioka, Shinsuke ^a   Nishimura, Hiroaki ^a   Ando, Tsuyoshi ^a   Ueda, Nobuyoshi ^a   Namba, Shinichi ^b   Aota, Tatsuya ^a   Murakami, Masakatsu ^a   Nishihara, Katsunobu ^a   Kang, Young G ^a   Atsushi, Sunahara ^c   Furukawa, Hiroyuki ^c   Shimada, Yoshinori ^c   Hashimoto, Kazuhisa ^c   Michiteru, Yamaura ^c   Yasuda, Yuzuri ^a   Nagai, Keiji ^a   Norimatsu, Takayoshi ^a   Miyanaga, Noriaki ^a   Izawa, Yasukazu ^a   Mima, Kunioki ^a  

^a OSAKA UNIVERSITY   (Japan)

^b HIROSHIMA UNIVERSITY   (Japan)

^c INSTITUTE FOR LASER TECHNOLOGY   (Japan)

Author keywords

Debris; Extreme ultraviolet; Laser produced plasma; Minimum mass target; Punch out scheme

Indexed keywords

ABLATION; DEBRIS; ELECTRIC CHARGE; LASER BEAM EFFECTS; LASER PULSES; MIRRORS; OPACITY; PLASMA DIAGNOSTICS; PLASMAS; SPECTROSCOPIC ANALYSIS; TIN;

EXTREME ULTRAVIOLET; LASER-PRODUCED PLASMAS; MINIMUM MASS TARGETS; PUNCH-OUT SCHEME;

PLASMA THEORY;

EID: 33745624794     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656071     Document Type: Conference Paper

References (38)

1. Y. Watanabe, K. Ota, H. Franken, and V. Banine, in EUV Source Workshop (2005).
2. D. W. Myers, I. V. Fomenkov, B. C. Kiene, and G. M. Blumenstock, in 3rd. International EUVL Symposium (2004).
3. T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, Appl. Phys. Lett. 86, 21502 (2005).
4. H. Komori, G. Soumagne, T. Abe, T. Suganuma, Y. Imai, H. Someya, Y. Takabayashi, A. Endo, and K. Toyoda, Jpn. J. Appl. Phys. 43, 3707 (2004).
5. A. Sasaki, K. Nishihara, M. Murakami, F. Koike, T. Kagawa, T. Nishikawa, K. Fujima, T. Kawamura, and H. Furukawa, Appl. Phys. Lett. 85, 5857 (2004).
6. S. Miyamoto, A. Shimoura, S. Amano, K. Fukugaki, H. kinugasa, T. Inoue, and T. Mochizuki, Appl. Phys. Lett. 86, 261502 (2005).
7. F. Jin and M. Richardson, Appl. Opt. 34, 5750 (1995).
8. R. C. Spitzer, T. J. Orzechowski, D. W. Phillion, R. L. Kauffman, and C. Cerjan, J. Appl. Phys. 79, 2251 (1996).
9. I. W. Choi, H. Daido, S. Yamagami, K. Nagai, T. Norimatsu, H. Takabe, M. Suzuki, T. Nakayama, and T. Matsui, J. Opt. Soc. Am. B 17, 1616 (2000).
10. Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, et al., Appl. Phys. Lett. 86, 051501 (2005).
11. T. Aota and T. Tomie, Phys. Rev. Lett. 94, 015004 (2005).
12. P. Hayden, A. Cummings, L. Gaynor, N. Murphy, G. O'Sullivan, P. Sheridan, E. Sokell, J. White, and P. Dunne (SPIE, 2005), vol. 5751, pp. 919-926.
13. S. Fujioka, H. Nishimura, K. Nishihara, A. Sasaki, A. Sunahara, T. Okuno, N. Ueda, T. Ando, Y. Tao, Y. Shimada, et al., Phys. Rev. Lett. 95, 235004 (2005).
14. A. Sunahara, K. Nishihara, K. Gamada, T. Nishikawa, A. Sasaki, H. Furukawa, M. Yamaura, S. Fujioka, Y. Tao, Y. Shimada, et al., in 3rd. International EUVL Symposium (2004).
15. K. Nishihara, A. Sasaki, A. Sunahara, and T. Nishikawa, EUV Sources for Lithography (SPIE Press, 2006), vol. PM149, chap. 11, p. 339.
16. A. Bar-Shalom, J. Oreg, and M. Klapisch, Phys. Rev. E 56, R70 (1997).
17. A. Ng, D. Pasini, P. Celliers, D. Parfeniuk, L. D. Silva, and J. Kwan, Appl. Phys. Lett. 45, 1046 (1984).
18. S. Fujioka, H. Nishimura, K. Nishihara, Y.-G. Kang, Y. Shimada, A. Sunahara, H. Furukawa, Q. Gu, K. Nagai, T. Norimatsu, et al., Appl. Phys. Lett. 87 (2004).
19. H. Tanaka, K. Akinaga, A. Takahashi, and T. Okada, Jpn. J. Appl. Phys. 43, L585 (2004).
20. H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, Appl. Phys. Lett. 87, 041503 (2005).
21. M. Yamaura, S. Uchida, A. Sunahara, Y. Shimada, H. Nishimura, S. Fujioka, T. Okuno, K. Hashimoto, K. Nagai, T. Norimatsu, et al., Appl. Phys. Lett. 86, 181107 (pages 3) (2005).
22. T. Ando, S. Fujioka, H. Nishimura, T. Aota, N. Ueda, M. Shimomura, H. Sakaguchi, Y. Yasuda, K. Nagai, T. Norimatsu, et al., submitted to Appl. Phys. Lett. (2006).
23. F. Bijkerk, G. Hergenhan, G. Schriever, K. Gabel, M. Schuermann, R. de Bruijn, S. A. van der Westen, T. Missalla, U. Stamm, and V. Bakshi, Tech. Rep. 04024498A-TR, International SEMATECH Manufacturing Initiative (2004), URL http://www.sematech.org/docubase/abstracts/4498atr.htm.
24. S. Sakabe, T. Mochizuki, T. Yamanaka, and C. Yamanaka, Rev. Sci. Instrum. 51, 1314 (1980).
25. J. Oberheide, P. Wilhelms, and M. Zimmer, Meas. Sci. Technol. 8, 351 (1997).
26. W. Mroz, D. Fry, A. Prokopiuk, M. P. Stockli, and B. Walch, in Proceedings of the 12th International Conference on High-Power Particle Beams (1998).
27. Y. B. Zel'dovich and Y. P. Raizer, Physics of shock wave and high-temperature hydrodynamic phenomena (Dover publications, inc., Mineola, New York, 2002).
28. P. Mora, Phys. Rev. Lett. 90, 185002 (2003).
29. M. Murakami, Y.-G. Kang, K. Nishihara, S. Fujioka, and H. Nishimura, Phys. Plasmas 12, 062706 (2005).
30. H. Komori, Y. Imai, G. Soumagne, T. Abe, T. Suganuma, and A. Endo, in 3rd International EUVL Symposium (2004b), p. Co05.
31. K. Takenoshita, C.-S. Koay, M. C. Richardson, and I. C. E. Turcu (SPIE, 2003), vol. 5037, pp. 792-800.
32. S. Namba, S. Fujioka, H. Nishimura, Y. Yasuda, K. Nagai, N. Miyanaga, Y. Izawa, K. Mima, and K. Takiyama, submitted to Appl. Phys. Lett..
33. T. W. Johnston and J. M. Dawson, Phys. Fluids 16, 722 (1973).
34. S. Uchida, M. Yamaura, Y. Shimada, K. Hashimoto, A. Sunahara, H. Furukawa, C. Yamanaka, T. Tao, S. Fujioka, H. Nishimura, et al., in 3rd. International EUVL symposium (2004), p. SoP28.
35. C. Yamanaka, Y. Kato, Y. Izawa, K. Yoshida, T. Yamanaka, T. Sasaki, M. Nakatsuka, T. Mochizuki, J. Kuroda, and S. Nakai, IEEE J. Quantum Electron. QE-17, 1639 (1981).
36. K. Nagai, H. Nishimura, T. Okuno, T. Hibino, R. Matsui, Y. Tao, M. Nakai, T. Norimatsu, N. Miyanaga, K. Nishihara, et al., Trans. Mater. Res. Soc. Jpn 29, 943 (2004).
37. Q. Gu, K. Nagai, T. Norimatsu, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, and Y. Izawa, Chem. Matter. 17, 1115 (2005).
38. M. Murakami and M. M. Basko, Phys. Plasma 13, 012105 (2006).