Open vs. closed-loop control of the MEMS electrostatic comb drive

Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05

Volumn 2005, Issue , 2005, Pages 976-982

  Borovic, B ^a   Hong, C ^b   Zhang, X M ^b   Liu, A Q ^b   Lewis, F L ^a  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Control; Electrostatic comb drive actuator; Feedback; Input shaping; MEMS; Modeling

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; ELECTROSTATIC DEVICES; MATHEMATICAL MODELS; SENSORS;

ELECTROSTATIC COMB DRIVE ACTUATOR; INPUT SHAPING; OPEN-LOOP TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 33745193290     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/.2005.1467147     Document Type: Conference Paper

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