Dynamic modeling and input shaping for MEMS

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 315-318

  Popa, Dan O ^a   Wen, John T ^a   Stephaneu, Harry ^a   Skidmore, George ^b   Ellis, Matt ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b ZYVEX CORPORATION   (United States)

Author keywords

Input shaping for MEMS; Open loop control; Reduced order modeling

Indexed keywords

ELECTROSTATIC DRIVES; INPUT SHAPING; OPEN-LOOP CONTROL; REDUCED ORDER MODELING;

ACTUATORS; BANDWIDTH; ELECTROSTATICS; FINITE ELEMENT METHOD; FIR FILTERS; PIEZOELECTRIC MATERIALS; SHAPE MEMORY EFFECT; SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 4043062407     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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