Control Issues for MEMS

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 2003, Pages 3039-3047

  Bryzek, Janusz ^a   Abbott, Eric ^b   Flannery, Anthony ^c   Cagle, David ^c   Maitan, Jacek ^d  

^a BN Ventures   (United States)

^b HONEYWELL   (United States)

^c Agile Microsystems

^d Transparent Networks   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRIC RESISTANCE; FINITE ELEMENT METHOD; INK; INSERTION LOSSES; MIRRORS; OPTIMIZATION; PHOTONS; SENSORS;

CONTROL LOOP; DYNAMIC PERFORMANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 1542348642     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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2. Seeger, J.I.; Crary, S.B., "Stabilization of electrostatically actuated mechanical devices", International Solid State Sensors and Actuators Conference (Transducers '97), 16-19 June 1997, Chicago, IL, USA, pp. 1133-1136.
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7. Evans, R. B., Griesbach, J. S., Messner, W. C.," Piezoelectric Microactuator for dual stage control", IEEE Transactions on Magnetics, March, 1999, vol. 35, no. 2, pp. 977-982.
8. Oboe, R., Beghi, A., Murari, B., "Modeling and control of a dual stage actuator hard disk drive with piezoelectric secondary actuator", Proceedings of the 1999 IEEE/ASME International Conference on Advanced Mechatronics, September 19-23, 1999, Atlanta, USA, pp. 138-143.
9. Suh, J.W., Darling, R.B.; Bohringer, K.-F., Donald, B.R., Baltes, H., Kovacs, G.T.A., "CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects", Journal of Microelectromechanical Systems; Dec. 1999; vol.8, no.4, p.483-96.
10. Zook, J.D.; Burns, D.W.; Herb, W.R.; Guckel, H.; Joon-Won Kang; Yongchul Ahn: Conference Proceedings: International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 25-29 June 1995, Stockholm, Sweden, p.600-3 vol.2
11. Bryzek J., Nasiri S., Flannery A., Novack M.: "Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage High-density IC for Photonic Switching" Proceedings of the Conference NanoTech 2003, San Francisco, February 24, 2003.
12. Bakin D., Bryzek J.: "A Multiport Cross-Connect Switch Using VLSI MOEMS Mirror Arrays". Optics and Photonics News, Vol. 13 Issue 11, November 2002.
13. Harwit A., Bryzek J., Abbott E., Maitan J., et. al.: "Designing for Reliability in Scalable MEMS based Optical Cross Connect Switches." Proceedings of Conference Opicomm 2002, Boston, MA, June 29-August 2, 2002.