Phase-lead compensator to improve the transient performance of comb actuators

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 178-180

  Chen, Yijian ^a,b   Shroff, Yashesh ^a   Oldham, William G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NONE   (United States)

Author keywords

Comb drive; Controller; Overshoot; Phase lead compensator; Rise time; Settling time; Transient optimization

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; NETWORKS (CIRCUITS); OPTIMIZATION;

COMB DRIVE; CONTROLLER; PHASE-LEAD COMPENSATOR; RISE TIME; SETTLING TIME; TRANSIENT OPTIMIZATION;

ELECTROSTATIC ACTUATORS;

EID: 0005527050     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. N. Choksi, Y. Shroff, D. S. Pickard, Y. Chen, W. G. Oldham, M. McCord, R. F. W. Pease, D. Markle, "Maskless extreme ultraviolet lithography," J. Vac. Sci. Technol. B 17(6), Nov/Dec, 1999, pp. 3047-3051.
2. L. M. Castañer and S. D. Senturia, "Speed-energy optimization of the electrostatic actuators based on pull-in," IEEE J. Microelectromech. Syst., vol. 8, pp. 290-298, Sep: 1999.
3. Y. Chen, Y. Shroff and W. G. Oldham, "Modeling and control of nanomirrors for EUV maskless lithography," The MSM conference, 2000, to be published.
4. R. C. Dorf and R. H. Bishop, Modern Control Systems, Menlo Park: Addison-Wesley, 1998.