Microstructural analysis of integrated pin-shaped two-dimensional and three-dimensional ferroelectric capacitors from micro-focused synchrotron X-ray techniques

Journal of Applied Crystallography

Volumn 39, Issue 3, 2006, Pages 376-384

  Menou, N ^a   Muller, Ch ^a   Goux, L ^b   Barrett, R ^c   Lisoni, J G ^b   Schwitters, M ^b   Wouters, D J ^b  

^a UNIVERSITÉ DE TOULON   (France)

^b IMEC   (Belgium)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744510385     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S002188980601082X     Document Type: Article

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