Challenges for integration of embedded FeRAMs in the sub-180 nm regime

Integrated Ferroelectrics

Volumn 53, Issue , 2003, Pages 247-255

  Zambrano, R ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

3D structures; FeCaps; FeRAMs; Ferroelectrics; SBT

Indexed keywords

CAPACITORS; FERROELECTRICITY; IRON COMPOUNDS; MICROSTRUCTURE; NONVOLATILE STORAGE;

FECAP STRUCTURES; STRAPPED CELLS;

FERROELECTRIC MATERIALS;

EID: 17444386786     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390258165     Document Type: Article

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