Influence of dry-etch patterning of top electrode and SrBi 2Ta2O9 on the properties of ferroelectric capacitors

Journal of the Electrochemical Society

Volumn 152, Issue 12, 2005, Pages

  Goux, L ^a   Paraschiv, V ^a   Lisoni, J G ^a   Schwitters, M ^a   Maes, D ^a   Haspeslagh, L ^a   Wouters, D J ^a   Casella, P ^b   Zambrano, R ^b  

^a IMEC   (Belgium)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DEGRADATION; DEPOSITION; ELECTRODES; FERROELECTRIC DEVICES; PLATINUM; POLARIZATION; STRONTIUM COMPOUNDS;

ELECTRICAL DAMAGE; FERROELECTRIC PROPERTIES;

DRY ETCHING;

EID: 30344483661     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2120407     Document Type: Article

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