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Volumn 70, Issue , 2005, Pages 115-122

Effect of ultra thin bottom electrode on the ferroelectric properties of Pb(Zr,Ti)O3 films grown by metal-organic chemical vapor deposition

Author keywords

Ir electrode; MOCVD; PZT; Ti diffusion

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRODES; GLUES;

EID: 24944436409     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490895860     Document Type: Article
Times cited : (3)

References (10)
  • 9
    • 0035041910 scopus 로고    scopus 로고
    • Self-polarization and texture of wet chemically derived lead zirconate titanate thin films
    • J. Frey, F. Schlenkrich, and A. Schonecker, "Self-polarization and texture of wet chemically derived lead zirconate titanate thin films," Integrated Ferroelectric 35, 105-113 (2001).
    • (2001) Integrated Ferroelectric , vol.35 , pp. 105-113
    • Frey, J.1    Schlenkrich, F.2    Schonecker, A.3
  • 10
    • 0037051212 scopus 로고    scopus 로고
    • Thermal stability of electrode stacks for application in oxide film devices
    • Z. Song, N. Chong, L. H. W. Chan, C. Choy, and C. Lin, "Thermal stability of electrode stacks for application in oxide film devices," Thin Solid Films 406, 268-274 (2002).
    • (2002) Thin Solid Films , vol.406 , pp. 268-274
    • Song, Z.1    Chong, N.2    Chan, L.H.W.3    Choy, C.4    Lin, C.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.