Radiation response of a mems accelerometer: an electrostatic force

IEEE Transactions on Nuclear Science

Volumn 45, Issue 6 PART 1, 1998, Pages 2779-2788

  Edmonds, L D ^a   Swift, G M ^a   Lee, C I ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; RADIATION EFFECTS;

DIELECTRIC CHARGING; ELECTROSTATIC FORCES;

ACCELEROMETERS;

EID: 0032312007     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/23.736528     Document Type: Article

References (6)

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2. C.I. Lee, A.H. Johnston, W.C. Tang, C.E. Barncs, and J. LykeTotal Dose Effects on Microelectromechanical Systems (MEMS): Accelerometers," IEEE Trans. Nucl. Sei., vol.43, pp.3127-3132, Dec. 1996.
3. Analog Devices Data BookMonolithic Accelerometer with Signal Conditioning: ADXL50."
4. W. KuehnelModelling of the Mechanical Behaviour of a Differential Capacitor Acceleration Sensor," Sensors and Actuators, A 48, pp.101-108, 1995.
5. J.R. Devancy, K.O. Leedy, and W.J. Keery, Notes on SEM Examination of Microelectronic Devices, NBS special publication 400-35, April 1977.
6. H.B. Garrett and C.P. Pike (editors), Space Systems and Their Interactions with Earth's Space Environment, New York University New York, p. 173, 1980.