RF actuation of capacitive MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2003, Pages 1919-1922

  Robert Reid, J ^a   Starman, LaVern A ^a   Webster, Richard T ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; MICROACTUATORS;

MICROWAVE ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0043092474     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. J. B. Rizk, E. Chaiban, and G. M. Rebeiz, Steady state Thermal Analysis and High-Power Reliability Considerations of RF MEMS Capacitive Switches, Microwave Symposium Digest. IEEE MTT-S International Meeting: June 2, 2002, pp. 239 - 242.
2. B. Pillans, J. Kleber, C. Goldsmith, and M. Eberly, RF Power Handling of Capacitive RF MEMS Devices, Microwave Symposium Digest. IEEE MTT-S International Meeting: June 2, 2002, pp. 329 - 332.
3. P. Osterberg, H. Yie, X. Cai, J. White, and S. Senturia, Self-consistent simulation and modeling of electrostatically deormed diaphragms, in Proc. MEMS 94, Oiso, Japan, pp. 28-32.
4. G. M. Rebeiz, Classroom Notes: RF MEMS Short Course, University of Michigan, 2002.
5. C. L. Goldsmith, Z. Yao, S. Eshelman, and D. Denniston, Performance of Low-Loss RF MEMS Capacitive Switches, IEEE Microwave and Guided Wave Letters, Vol. 8, No. 8, August 1998, pp. 269 - 271.