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Tribology Letters

Volumn 19, Issue 4, 2005, Pages 265-272

Failure mechanisms of capacitive MEMS RF switch contacts

(2) Patton, Steve T a Zabinski, J S b

a UNIVERSITY OF DAYTON RESEARCH INSTITUTE (United States)

b AIR FORCE RESEARCH LABORATORY (United States)

Author keywords

Capacitive RF switches; Dielectric charging; Failure mechanisms; MEMS; Micro Nanoscale adhesion; Reliability

Indexed keywords

FAILURE;

EID: 26044450049 PISSN: 10238883 EISSN: None Source Type: Journal
DOI: 10.1007/s11249-005-7443-7 Document Type: Article

Times cited : (25)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.