Synthesis and characterization of phosphorus-doped ZnO and (Zn,Mg)O thin films via pulsed laser deposition

Journal of Electronic Materials

Volumn 35, Issue 4, 2006, Pages 530-537

  Li, Y J ^a   Heo, Y W ^a   Erie, J M ^a   Kim, H ^a   Ip, K ^a   Pearton, S J ^a   Norton, D P ^a  

^a University of Florida   (United States)

Author keywords

(Zn,Mg)O; Phosphorus doped; Pulsed laser deposition; Wide bandgap semiconductor; Zinc oxide

Indexed keywords

(ZN,MG)O; ANNEALING TEMPERATURE; PHOSPHORUS DOPED; WIDE BANDGAP SEMICONDUCTOR;

CRYSTALLINE MATERIALS; DOPING (ADDITIVES); OPTICAL PROPERTIES; PHOSPHORUS; PULSED LASER DEPOSITION; TRANSPORT PROPERTIES; ZINC OXIDE;

THIN FILMS;

EID: 33646720125     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-006-0095-z     Document Type: Conference Paper

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