Reliability of MEMS for space applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6111, Issue , 2006, Pages

  Shea, Herbert R ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER UTILIZATION; ELECTRONICS PACKAGING; MICROACTUATORS; MICROSENSORS; SILICON; SPACE APPLICATIONS; SPACECRAFT;

MEMS SENSORS; SILICON TECHNOLOGIES; THERMAL SHOCK;

MICROELECTROMECHANICAL DEVICES;

EID: 33646055796     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.651008     Document Type: Conference Paper

References (33)

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