Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 87-96

  Wallash, Al ^a   Levit, Larry ^b  

^a MAXTOR CORPORATION   (United States)

^b Ion Systems   (United States)

Author keywords

Electrical breakdown; Electrostatic discharge; ESD; GMR; MEMS; Paschen curve; Reticle; Spark gap

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC SPARKS; ELECTROSTATICS; ENERGY GAP; MICROELECTROMECHANICAL DEVICES; MIM DEVICES; TRIBOELECTRICITY;

FIELD EMISSION EFFECTS; PASCHEN CURVES;

ELECTRIC BREAKDOWN OF GASES;

EID: 0038735374     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478191     Document Type: Conference Paper

References (12)

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