Metallization schemes for radio frequency microelectromechanical system switches

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1172-1177

  Leedy, K D ^a   Cortez, R ^a   Ebel, J L ^a   Strawser, R E ^a   Walker, A P ^a   DeSalvo, G C ^b   Young, R M ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; EVAPORATION; GOLD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY; PLATINUM; SPUTTER DEPOSITION; STRESSES; SURFACE TREATMENT; TITANIUM; TUNGSTEN;

COMPOSITE METAL BEAMS; FIXED-FIXED BEAM STRUCTURES; MICROELECTROMECHANICAL SYSTEM SWITCHES; STRESS GRADIENT;

METALLIZING;

EID: 0042030788     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1560714     Document Type: Article

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