Porous silicon-based sensors: Prospects and challenges

Materials and Manufacturing Processes

Volumn 21, Issue 3, 2006, Pages 239-246

  Saha, H ^a   Pramanik, C ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

Contact problem; Doping difficulty; FPGA; High resistivity; Instability; MEMS; Nanocrystalline; Nonuniformity; Phase detection electronics; Porous silicon; Pressure sensors; Signal conditioning; SMART sensor; Vapor sensors

Indexed keywords

DOPING (ADDITIVES); FIELD PROGRAMMABLE GATE ARRAYS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; POROUS SILICON; SIGNAL PROCESSING; STABILITY;

CONTACT PROBLEMS; DOPING DIFFICULTY; HIGH RESISTIVITY; NONUNIFORMITY; PHASE DETECTION ELECTRONICS; PRESSURE SENSORS; SMART SENSORS; VAPOR SENSORS;

CHEMICAL SENSORS;

EID: 33645761457     PISSN: 10426914     EISSN: 15322475     Source Type: Journal    
DOI: 10.1080/10426910500464461     Document Type: Article

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