Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application

Solid-State Electronics

Volumn 45, Issue 6, 2001, Pages 997-1001

  Kleps, Irina ^a   Angelescu, Anca ^a   Samfirescu, Narcis ^a   Gil, Adriana ^b   Correia, Antonio ^c  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^c CMP Cientifica   (Spain)

Author keywords

DLC; Field emission; Porous silicon; Pressure sensor; Silicon carbide; Silicon emitter array

Indexed keywords

DIAMOND LIKE CARBON FILMS; ELECTRON EMISSION; ETCHING; FIELD EMISSION DISPLAYS; MICROMACHINING; MORPHOLOGY; POROUS SILICON; SILICON CARBIDE;

FIELD EMISSION PRESSURE SENSORS;

SENSORS;

EID: 0035360255     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(01)00148-4     Document Type: Article

References (10)

1. Porous silicon field emitter properties
2. Characterisation of porous silicon field emitter properties
3. Porous silicon field emitters for display applications
4. Porous silicon field emitters for display applications
5. Investigation of porous silicon morphology for electron emission applications
6. Modeling of the field emission microtriode with emitter covered with porous silicon
7. Field emission properties of silicon carbide and diamond-like carbon (DLC) films made by chemical vapour deposition techniques
8. Investigation of LPCVD silicon carbide and silicon carbonitride thin films structure and composition for field emission applications
9. Analysis of a pressure sensor based on an array of collector-assisted field-emission triodes
10. Modeling of the field emitter triode (FET) as a displacement/pressure sensor