A humidity sensor featuring a porous silicon capacitor with an integrated refresh resistor

Sensors and Materials

Volumn 12, Issue 1, 2000, Pages 35-55

  Rittersma, Zacharias M ^a   Benecke, Wolfgang ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Humidity sensor; Porous silicon; Refresh resistor

Indexed keywords

EID: 0006411756     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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