Single crystal silicon piezoresistive nano-wire bridge

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 244-249

  Toriyama, T ^a   Sugiyama, S ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Nano wire bridge; Piezoresistance coefficient; Single crystal silicon

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FINITE ELEMENT METHOD; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXYGEN; PIEZOELECTRICITY; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SENSORS; SINGLE CRYSTALS; STRESS ANALYSIS;

MECHANICAL SENSORS; NANO-WIRE BRIDGES; PIEZORESISTANCE COEFFICIENT;

SILICON;

EID: 0344514609     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00269-3     Document Type: Conference Paper

References (13)

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