Role of parasitics in humidity sensing by porous silicon

Sensors and Actuators, A: Physical

Volumn 94, Issue 1-2, 2001, Pages 44-52

  Das, J ^a   Hossain, S M ^a   Chakraborty, S ^a   Saha, H ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

Humidity sensor; Porous silicon

Indexed keywords

CAPACITANCE; COMPUTATIONAL GEOMETRY; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; NATURAL FREQUENCIES; POROUS SILICON; SIGNAL PROCESSING;

PARASITICS;

CHEMICAL SENSORS;

EID: 0035980473     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00688-4     Document Type: Article

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