High-performance planar inductor on thick oxidized porous silicon (OPS) substrate

IEEE Microwave and Guided Wave Letters

Volumn 7, Issue 8, 1997, Pages 236-238

  Nam, Choong Mo ^a   Kwon, Young Se ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

MMIC; Oxidized porous silicon (OPS); Planar inductor

Indexed keywords

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON; SUBSTRATES;

OXIDIZED POROUS SILICON (OPS); PLANAR INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0031211142     PISSN: 10518207     EISSN: None     Source Type: Journal    
DOI: 10.1109/75.605489     Document Type: Article

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