Electrode design and planar uniformity of anodically etched large area porous silicon

Semiconductor Science and Technology

Volumn 17, Issue 1, 2002, Pages 55-59

  Hossain, S M ^a   Das, J ^a   Chakraborty, S ^a   Dutta, S K ^b   Saha, H ^a  

^a JADAVPUR UNIVERSITY   (India)

^b City College   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ELECTROCHEMICAL ELECTRODES; ETCHING; LIGHT REFLECTION; PHOTOLUMINESCENCE; POROSITY; SURFACE STRUCTURE;

ANODIC ETCHING;

POROUS SILICON;

EID: 0036142881     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/17/1/309     Document Type: Article

References (16)