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Volumn 3, Issue 2, 1999, Pages 141-150

Electrothermally actuated bi-directional linear vibromotor

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0033438111     PISSN: 10893954     EISSN: 10893954     Source Type: Journal    
DOI: 10.1080/108939599199800     Document Type: Article
Times cited : (3)

References (9)
  • 1
    • 0027664612 scopus 로고
    • Controlled Stepwise Motion in Polysilicon Microstructures
    • Sept
    • T. Akiyama and K. Shono. Controlled Stepwise Motion in Polysilicon Microstructures, J Microelectromech. Syst., vol. 2, no. 3. pp. 106-110. Sept. 1993.
    • (1993) J Microelectromech. Syst. , vol.2 , Issue.3 , pp. 106-110
    • Akiyama, T.1    Shono, K.2
  • 2
    • 0040515772 scopus 로고
    • Polysilicon Linear Microvibromotors, Prue
    • A. P. Lee, D. J. Nikkei, and A. P. Pisano. Polysilicon Linear Microvibromotors, Prue. Transducers 93, pp. 46-49, 1993.
    • (1993) Transducers , vol.93 , pp. 46-49
    • Lee, A.P.1    Nikkei, D.J.2    Pisano, A.P.3
  • 7
    • 0032295012 scopus 로고    scopus 로고
    • Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators, ASME IMECE Prue
    • DSC-vol
    • R. A. Conant and R. S. Muller. Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators, ASME IMECE Prue. Micrueìectrumechanical Systems. DSC-vol. 66, pp. 273-277, 1998.
    • (1998) Micrueìectrumechanical Systems. , vol.66 , pp. 273-277
    • Conant, R.A.1    Muller, R.S.2
  • 8
    • 0030719706 scopus 로고    scopus 로고
    • Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level Planarized Surface-Micromachined Polycrystalline Silicon Process
    • J. H. Comtois, M. A. Michalicek, and C. C. Barron. Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level Planarized Surface-Micromachined Polycrystalline Silicon Process. Prue. Transducers '97. pp. 769-772, 1997.
    • (1997) Prue. Transducers '97 , pp. 769-772
    • Comtois, J.H.1    Michalicek, M.A.2    Barron, C.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.