Microelectromechanical tunable capacitors for reconfigurable RF architectures

Journal of Micromechanics and Microengineering

Volumn 16, Issue 3, 2006, Pages 601-611

  Rijks, Th G S M ^a,d   Steeneken, P G ^a   Van Beek, J T M ^a   Ulenaers, M J E ^a   Jourdain, A ^b   Tilmans, H A C ^b   De Coster, J ^c   Puers, R ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

^d PHILIPS LIGHTING   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DIES; ELECTRONICS PACKAGING; SILICON; THERMODYNAMIC STABILITY; THIN FILMS;

HIGH-OHMIC SILICON; MICROELECTROMECHANICAL TUNABLE CAPACITORS; RF ARCHITECTURES; SELF-ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33344468431     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/16/3/016     Document Type: Article

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