Influence of RF signal power on tunable MEMS capacitors

Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

Volumn 2, Issue , 2003, Pages 663-666

  Cruau, Aurelie ^a   Nicole, Pierre ^a   Lissorgues, Gaelle ^b   Tassetti, Charles Mane ^b  

^a THALES   (France)

^b ESIEE PARIS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; CAPACITANCE VALUES; CAPACITIVE STRUCTURE; COMPUTATIONAL RESULTS; LOW POWER; MEMS CAPACITORS; RF SIGNAL; TUNABLE CAPACITORS;

CAPACITORS;

EID: 9244231650     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.177564     Document Type: Conference Paper

References (12)

1. RE Borwiek Ill, PA Stupar, J DeNatale, R Anderson, C Tsai, K Garrett, A high Q large tuning range, tunable capacitor for RF applications, MEALS 2002, pp 669-672
2. I-B Yoon, C T-C Nguyen A high-Q tunable micromechanieal capacitor with movable dielectric for RF applications, Tech digest IEEE inK Electron devices meeting, San Francisco, pp 489-492, Dec 2000
3. Z Feng, H Zhang, K C Gupta, W Zhang, V M Bright Y C Lee, M EMS-based series and shunt variable capacitors for microwave and millimeter-wave frequencies, Sensors and actuators A, vol 91, pp 256-265, 2001
4. J Y Park, YJ Yes, H J Nam J U Ba Micromachined RF MEMS tunable capacitors using piezoelectric actuatora, IEEE A 71/5, 2001
5. G V lonis, A Dee, K Suyama, Differential multi-finger MEMS tunable capacitors for RF integrated circuits, MTT-S, pp 345-348, 2002
6. A Dee, K Suyama, Micromachined electro-mechanically tunable capacitors and their applications to RF ICs, IEEE Trans Microwave Theory and Tech , vol 46, i 12, pp 2587-2594, December 1998
7. Z Xiao, W Peng, R F Wolffenbuttel, KR Farmer, Micromachined variable capacitor with wide tuaing range, Solid-state sensor , actuator and Microsystems workshop Hilton head island, pp 346-349, june 2002
8. L Duasopt, 0 M Rebeiz, Fligh-Q millimeter-wave MEMS varactnrs : extended tunnig range and discrete-position designs, IEEE MTT-S, Seattle (USA), June 2002
9. H Nieminen, V Ermolov, K Nybergh, S Silanto, T Ryhttnen MicroeLectromechanical capacitors for RF applications, J Micromech Microeng ,vol 12, pp 177-186, 2002
10. Al Gallant, D Wood, The modelling and fabrication of widely tunable capacitors, Journal of Micromechanics and Microengineering, 13, 5178-5182, 2003
11. B Pillanns, 3 Kiebcr, C Goldsmith, M,Eberly, RF Power handling of capacitive RF MEMS devices, MTT-S, TU4DI, pp 329-332, 2002
12. B D Jensen K Saitou, J L Volakis, K Kurabayashi, Impact of skin effect on thermal behaviour of RF MEMS switches, o ASME-JSME thermal engineering joint conference, TED-AJO3-420, march 2003