Optimization of mechanical properties of thin free-standing metal films for RF-MEMS

Materials Research Society Symposium Proceedings

Volumn 820, Issue , 2004, Pages 177-182

  Den Toonder, Jaap M J ^a,b   Van Dijken, Auke R ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; MECHANICAL PROPERTIES; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALUMINUM FILMS; METAL FILMS; NANO-INDENTATION; RADIO FREQUENCY MICRO ELECTROMECHANICAL SYSTEMS (RF-MEMS);

THIN FILMS;

EID: 12344333951     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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