Patterning Techniques and Semiconductor Materials for Flexible Electronics

Flexible Flat Panel Displays

Volumn , Issue , 2005, Pages 195-217

  Rogers, John A ^a   Blanchet, Graciela ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b DUPONT COMPANY   (United States)

Author keywords

Contact printing; High resolution patterning methods; Microcontact printing (mCP); Nanotransfer printing (nTP); PANI SWNT donor; Patterning circuits on plastic; Poly(dimethylsiloxane) (PDMS); Thermal transfer printing; Thin film transistor (TFT)

Indexed keywords

EID: 33144464935     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/0470870508.ch11     Document Type: Chapter

References (44)

1. Alvarez W. E., Kitiyanan B., Borgna A. and Resasco D. E. (2001) Synergism of Co and Mo in the catalytic production of single-wall carbon nanotubes by decomposition of CO. Carbon 39, 547-58.
2. Avouris P. (2002) Molecular electronics with carbon nanotubes. Accounts of Chemical Research 35, 1026-34.
3. Bao Z., Kuck V., Rogers J. A. and Paczkowski M. A. (2002) Silsesquioxane resins as high performance solution processable dielectric materials for organic transistor applications. Advanced Functional Materials 12, 526-31.
4. Baude P. F., Ender D. A., Haase M. A., Kelley T. W., Muyres D. V. and Theiss S. D. (2003) Pentacenebased radio-frequency identification circuitry. Applied Physics Letters 82, 3964-66.
5. Behl M., Seekamp J., Zankovych S., Torres C. M. S., Zentel R. and Ahopelto J. (2002) Towards plastic electronics: patterning semiconducting polymers by nanoimprint lithography. Advanced Materials 14, 588-91.
6. Blanchet G., Loo Y.-L., Rogers J. A., Gao F. and Fincher C. (2003) Large area dry printing of organic transistors and circuits. Applied Physics Letters 82, 463-65.
7. Bronikowski M. J., Bradley R. K., Nikolaev P.,Willis P. A., Colbert D. T., Smith K. A. and Smalley R. E. (2000) Gas-phase method for large-scale production of single-walled carbon nanotubes. Abstracts of Papers of the American Chemical Society 219, 421.
8. Duan X. F., Niu C. M., Sahi V., Chen J., Parce J. W., Empedocles S. and Goldman J. L. (2003) Highperformance thin film transistors using semiconductor nanowires and nanoribbons. Nature 425, 274-78.
9. Durkop T., Getty S. A., Cobas E. and Fuhrer M. S. (2004) Extraordinary mobility in semiconducting carbon nanotubes. Nano Letters 4, 35-9.
10. Garnier F., Hajlaouir R., Yassar A. and Srivastava P. (1994) All-polymer field-effect transistor realized by printing techniques. Science 265, 1684-86.
11. Hua F., Sun Y., Guar A., Meitl M. A., Bilhaut, L., Rotkina L.,Wang J., Geil P., Shim M., Rogers J. A. and Shim A. (2004) Polymer imprint lithography with molecular-scale resolution. Nano letters 4, 2467-2471.
12. Jacobs H. O., Tao A. R., Schwartz A., Gracias D. H. and Whitesides G. M. (2002) Fabrication of a cylindrical display by patterned assembly. Science 296, 323-25.
13. Kagan, C. R. and Andry, P. (2003) Thin Film Transistors, Marcel Dekker.
14. Kim C., Shtein M. and Forrest S. R. (2002) Nanolithography based on patterned metal transfer and its application to organic electronic devices. Applied Physics Letters 80, 4051-53.
15. Krupke R., Hennrich F., von Lohneysen H. and Kappes M. M. (2003) Separation of metallic from semiconducting single-walled carbon nanotubes. Science 301, 344-47.
16. Kumar A. and Whitesides G. M. (1993) Features of gold having micrometer to centimeter can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ink followed by chemical etching. Applied Physics Letters 63, 2002-4.
17. Lee Y., Li H. D. and Fonash S. J. (2003) High-performance poly-Si TIFTs on plastic substrates using a nano-structured separation layer approach. IEEE Electron Device Letters 24, 19-21.
18. Lefenfeld M., Blanchet G. and Rogers J. A. (2003) High performance contacts in plastic transistors and logic gates that use printed electrodes of DNNSA-PANI doped with single-walled carbon nanotubes. Advanced Materials 15, 1188-91.
19. Loo Y.-L., Hsu J. W. P., Willett R. L., Baldwin K. W., West K. W. and Rogers J. A. (2002a) Highresolution transfer printing on GaAs surfaces using alkane dithiol self-assembled monolayers. Journal of Vacuum Science and Technology B 20, 2853-56.
20. Loo Y.-L., Someya T., Baldwin K. W., Ho P., Bao Z., Dodabalapur A., Katz H. E. and Rogers J. A. (2002b) Soft, conformable electrical contacts for organic transistors: high resolution circuits by lamination. Proceedings of the National Academic Science USA 99, 10252-56.
21. Loo Y.-L., Willett R. W., Baldwin K. and Rogers J. A. (2002c) Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: applications in plastic electronics. Applied Physics Letters 81, 562-64.
22. Loo Y.-L., Willett R. W., Baldwin K. and Rogers J. A. (2002d) Interfacial chemistries for nanoscale transfer printing, Journal of the American Chemistry Society 124, 7654-55.
23. McEuen P. L., Fuhrer M. S. and Park H. K. (2002) Single-walled carbon nanotube electronics. IEEE Transitions on Nanotechnology 1, 78-85.
24. Meitl, M. A., Zhou, Y. X. Gaur, A., Jeon, S., Usrey, M. L., Strano M. S. and Rogers, J. A (2004) Nano Letters 4, 1643.
25. Menard E., Bilhaut L., Zamseil J. and Rogers J. A. (2004) Improved chemistries, thin film deposition techniques and stam design for nontransfer printing. Langmuir 20, 6871-6878.
26. Menard E., Lee K., Young D. Y., Nuzzo R. and Rogers J. A. (2004b) A printable form of silicon for high performance flexible thin film transistors. Applied Physics Letters, submitted.
27. Michel B., Bernard A., Bietsch A., Delamarche E., Geissler M., Juncker D., Kind H., Renault J. P., Rothuizen H., Schmid H., Schmidt-Winkel P., Stutz R. and Wolf H. (2001) Printing meets lithography: soft approaches to high-resolution printing. IBM Journal of Research and Development 45, 697-719.
28. Mirkin C. A. and Rogers J. A. (2001) Emerging methods for micro- and nanofabrication. MRS Bulletin 26, 506-07.
29. Ridley B. A., Nivi B. and Jacobson J. M. (1999) All-inorganic field effect transistors fabricated by printing. Science 286, 746-49.
30. Rogers J. A., Paul K. E. and Whitesides G. M. (1998) Quantifying distortions in soft lithography. Journal of Vacuum Science and Technology B 16, 88-97.
31. Rogers J. A., Bao Z. and Makhija A. (1999) Non-photolithographic fabrication sequence suitable for reel-to-reel production of high performance organic transistors and circuits that incorporate them. Advanced Materieals 11, 741-45.
32. Rogers J. A., Bao Z., Baldwin K., Dodabalapur A., Crone B., Raju V. R., Kuck V., Katz H. E., Amundson K., Ewing J. and Drzaic P. (2001) Paper-like electronic displays: large area, rubber stamped plastic sheets of electronics and electrophoretic inks. Proceedings of the National Academy of Sciences USA 98, 4835-40.
33. Schmid H.,Wolf H., Allenspach R., Riel H., Karg S., Michel B. and Delamarche E. (2003) Preparation of metallic films on elastomeric stamps and their application for contact processing and contact printing. Advanced Functional Materials 13, 145-53.
34. Sirringhaus H., Kawase T., Friend R. H., Shimoda T., Inbasekaran M.,W. M. andWoo E. P. (2000) Highresolution inkjet printing of all-polymer transistor circuits. Science 290, 2123-26.
35. Strano M. S., Dyke C. A., Usrey M. L., Barone P. W., Allen M. J., Shan H. W., Kittrell C., Hauge R. H., Tour J. M. and Smalley R. E. (2003) Electronic structure control of single-walled carbon nanotube functionalization. Science 301, 1519-22.
36. Sundar V. C., Zaumseil J., Podzorov V., Someya T., Gershenson M. and Rogers J. A. (2004) Elastomeric transistor stamps for reversible probing of charge transport in molecular crystals. Science 303, 1644-46.
37. Sze S. (1985) Semiconductor Devices: Physics and Technology, John Wiley & Sons, Inc., New York.
38. Talghader J. J., Tu. J. K. and Smith J. S. (1995) Integration of fluidically self-assembled optoelectronic devices using a silicon-based process. IEEE Photon Technology 7, 1321-23.
39. Xia Y., Rogers J. A., Paul K. E. and Whitesides G. M. (1999) Unconventional methods for fabricating and patterning nanostructures, Chemical Reviews 99, 1823-48.
40. Zaumseil J., Baldwin K. and Rogers J. A. (2003a) Electrical characteristics of organic transistors formed by soft contact lamination. Journal of Applied Physics 93, 6117-24.
41. Zaumseil J., Meitl M. A., Hsu J. W. P., Acharya B., Baldwin K. W., Loo Y.-L. and Rogers J. A. (2003b) Three-dimensional and multilayer nanostructures formed by nanotransfer printing. Nano Letters 3, 1223-27.
42. Zaumseil J., Someya T., Baldwin K., Bao Z., Loo Y.-L. and Rogers J. A. (2003c) Nanoscale organic transistors formed by soft contact lamination and source/drain electrodes supported by high resolution rubber stamps. Applied Physics Letters 82, 793-95.
43. Zheng M., Jagota A., Semke E. D., Diner B. A., McLean R. S., Lustig S. R., Richardson R. E. and Tassi N. G. (2003) DNA-assisted dispersion and separation of carbon nanotubes. Nature Materials 2, 338-42.
44. Zhou, Y., Gaur, A., Hur, S.-H., Kocabas, C., Meitl, M., Shim, M. and Rogers, J.A. (2004) Nano Letters 4, 2031.