Plasma parameters of an oxygen microwave discharge obtained by probe diagnostics: I. Axial distributions

Plasma Sources Science and Technology

Volumn 15, Issue 1, 2006, Pages 126-134

  Kiss'ovski, Zh ^a   Tsankov, Ts ^a   Korzec, D ^b   Kytzia, S ^b   Engemann, J ^b  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; MICROWAVES; NUMERICAL ANALYSIS; OXYGEN; PLASMA DIAGNOSTICS; PLASMA PROBES; PRESSURE EFFECTS;

ELECTRON ENERGY; ELECTRONEGATIVITY; PLASMA PARAMETER; PLASMA POTENTIAL;

ELECTRIC DISCHARGES;

EID: 32844454464     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/15/1/019     Document Type: Article

References (47)

1. Xu Y Y, Ogishima T, Korzec D, Nakanishi N and Hatanaka Y 1999 Japan. J. Appl. Phys. 38 4538-41
2. Rużyłło J 1990 Solid State Technol. 118 211
3. Lin T, Belser M and Tzeng Y 1988 IEEE Trans. Plasma Sci. 16 631
4. Amemiya H, Yasuda N and Endou M 1994 Plasma Chem. Plasma Proc. 14 209
5. Carl D A, Hess D W and Libermann M A 1990 J. Vac. Sci. Technol. A 8 2924
6. Gudmundsson J T and Libermann M A 1998 Plasma Sources Sci. Technol. 7 1-12
7. Granier A 1992 Microwave discharges: Fundamentals and Applications (NATO ASI Series 302B) ed C M Ferreira and M Moisan (New York: Plenum) p 491
8. Korzec D, Werner F, Winter R and Engemann J 1996 Plasma Sources Sci. Technol. 5 216-34
9. Gudmundsson J T, Kouznetsov I G, Patel K K and Libermann M A 2001 J. Phys. D: Appl. Phys. 34 1100
10. Franklin R N 2001 J. Phys. D: Appl. Phys. 34 1834-9
11. Franklin R N 2002 Plasma Sources Sci. Technol. 11 A31-37
12. Lichtenberg A J, Libermann M A, Kouznetsov I G and Chung T H 2000 Plasma Sources Sci. Technol. 9 45
13. Bogdanov E A, Kolobov V I, Kudryavtsev A A and Tsendin L D 2002 Tech. Phys. 47 946
14. Pinheiro M J, Gousset G, Granier A and Ferreira C M 1998 Plasma Sources Sci. Technol. 7 524
15. Guerra V and Loureiro J 1999 Plasma Sources Sci. Technol. 8 110
16. Tristant P, Gousset G, Regnier C and Desmaison J 2002 Plasma Sources Sci. Technol. 11 241
17. Bacal M 1993 Plasma Sources Sci. Technol. 2 190
18. Stoffels E, Stoffels W W, Vender D, Haverlag H, Kroesen G M W and de Hoog F J 1995 Contrib. Plasma Phys. 35 4
19. Doucet H J 1970 Phys. Lett. A 33 283
20. Braithwaite N and Allen J 1988 J. Phys. D: Appl. Phys. 21 1733-7
21. Stamate E and Ohe K 1998 J. Appl. Phys. 84 2450-8
22. Shindo M, Uchino S, Ichiki R, Yoshimura S and Kawai Y 2001 Rev. Sci. Instrum. 72 2288-93
23. Chabert P, Sheridan T E, Boswell R W and Perrin J 1999 Plasma Sources Sci. Technol. 8 561-70
24. Amemiya H 1991 J. Phys. D: Appl. Phys. 23 999
25. Dias F M, Tatarova E, Crespo H and Ferreira C M 2001 Rev. Sci. Instrum. 72 1680
26. Popov T K and Gateva S V 2001 Plasma Sources Sci. Technol. 10 614-20
27. Winter R, Korzec D, Sprang N, Theirich D and Engemann J 1995 Surf. Coat. Technol. 74-75 618-24
28. Korzec D, Traub K, Werner F and Engemann J 1996 Thin Solid Films 281-282 143-5
29. Winter R, Korzec D and Engemann J 1997 Surf. Coat. Technol. 93 134-41
30. Moisan M, Hubert J, Margot J and Zakrzewski Z 1999 Advanced Technologies Based on Wave and Beam Generated Plasmas ed H Schlüter and A Shivarova (Dordrecht: Kluwer)
31. Aliev Yu M, Schlüter H and Shivarova A 2000 Guided-Wave-Produced Plasmas (Berlin: Springer)
32. Margot-Chaker J, Moisan M, Chaker M, Glaude V M M, Lauque P, Paraszczak J and Sauve G 1989 J. Appl. Phys. 66 4134-48
33. Grosse S, Schlüter H and Tatarova E 1994 Plasma Sources Sci. Technol. 3 545-55
34. Vinogradov G K, Ivanov Yu A and Lebedev Ya A 1981 Methods of Contact Diagnostics of Nonequilibrium Plasma Chemistry (Moscow, Nauka) (in Russian)
35. Korzec D, Kytzia S and Engemann J 2003 Slotted antenna microwave plasma sources: design techniques and physics characterization 5th Int. Workshop on Microwave Discharges: Fundamentals and Application (Greifswald, 8-12 July)
36. Itikawa Y, Ichimura A, Onda K, Sakimoto K, Takayanagi K, Hatano Y, Hayashi M, Nishimura H and Tsurubuchi S 1989 J. Phys. Chem. Ref. Data 18 23-42
37. Jackson J D 2002 Klassische Elektrodynamik 3 Auflage (Berlin: de Gruyter)
38. Gorbunov N, Kopytov A and Latyshev F 2002 Technical Physics 47 940-5
39. Braithwaite N, Sheridan T E and Boswell R 2003 J Phys. D: Appl. Phys. 36 2837
40. Nikitin A, Balghiti F and Bacal M 1996 Plasma Sources Sci. Technol. 5 37
41. Kono A 1999 J. Phys. D: Appl. Phys. 32 1761
42. Ferreira C M, Gousset G and Touzeau M 1988 J. Phys. D: Appl. Phys. 21 1403
43. Ivanov V V, Klopovsky K S, Lopaev D V, Rakhimov A T and Rakhimova T V 1999 IEEE Trans. Plasma Sci. 27 1279
44. Godyak V A, Piejak R B and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 36
45. Bryant P, Dyson A and Allen J 2001 J. Phys. D: Appl. Phys. 34 95
46. Amemiya H and Yasuda N 1997 J. Phys. Soc. Japan 66 623
47. Franklin R N 2002 J. Phys. D: Appl. Phys. 34 1094