Langmuir probe measurements of weakly collisional electronegative RF discharge plasmas

Journal of Physics D: Applied Physics

Volumn 34, Issue 1, 2001, Pages 95-104

  Bryant, Paul ^a   Dyson, Anthony ^a   Allen, John E ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LANGMUIR BLODGETT FILMS; PROBES; SATURATION (MATERIALS COMPOSITION); THERMAL EFFECTS;

ELECTRONEGATIVE PLASMAS;

PLASMA COLLISION PROCESSES;

EID: 0035124938     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/1/316     Document Type: Article

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