-
1
-
-
0000041999
-
-
1995.
-
E. Stoffels, W. W. Stoffels, D. Vender, M. Kondo, G. M. W. Kroesen, and F. J. deHoog, "Negative ions in radio-frequency oxygen plasma," Phys. Rev. E. vol. 51, p. 2425, 1995.
-
W. W. Stoffels, D. Vender, M. Kondo, G. M. W. Kroesen, and F. J. DeHoog, "Negative Ions in Radio-frequency Oxygen Plasma," Phys. Rev. E. Vol. 51, P. 2425
-
-
Stoffels, E.1
-
2
-
-
0028494947
-
-
1994.
-
E. Gogolides, M. Stathakopoulos, and A. Boudouvis, "Modeling of radio frequency plasmas in tetrafluoromethane (CF4): The gas phase physics and the role of negative ion detachment," J. Phys. D, Appt. Phys., vol. 27, p. 1878, 1994.
-
M. Stathakopoulos, and A. Boudouvis, "Modeling of Radio Frequency Plasmas in Tetrafluoromethane (CF4): the Gas Phase Physics and the Role of Negative Ion Detachment," J. Phys. D, Appt. Phys., Vol. 27, P. 1878
-
-
Gogolides, E.1
-
3
-
-
0027680530
-
-
1993.
-
R. N. Franklin, P. G. Daniels, and J. Snell, "Characteristics of electric discharges in the halogens: The recombination-dominated positive column," J. Phys. D, Appl. Phys.. vol. 26, p. 1638, 1993.
-
P. G. Daniels, and J. Snell, "Characteristics of Electric Discharges in the Halogens: the Recombination-dominated Positive Column," J. Phys. D, Appl. Phys.. Vol. 26, P. 1638
-
-
Franklin, R.N.1
-
5
-
-
33747365147
-
-
1997.
-
V. V. Ivanov, K. S. Klopovsky, D. V. Lopaev, Yu. A. Mankelevich, A. T. Rakhimov, and T. V. Rakhimova, "Nonlocal effects in stationary and nonstationary discharges," in Electron Kinetics and Applications of Glow Discharges, NATO ASI Series, Series B: Physics, U. Kortshagen and L. D. Tsendin, Eds., vol. 367, p. 37, 1997.
-
K. S. Klopovsky, D. V. Lopaev, Yu. A. Mankelevich, A. T. Rakhimov, and T. V. Rakhimova, "Nonlocal Effects in Stationary and Nonstationary Discharges," in Electron Kinetics and Applications of Glow Discharges, NATO ASI Series, Series B: Physics, U. Kortshagen and L. D. Tsendin, Eds., Vol. 367, P. 37
-
-
Ivanov, V.V.1
-
6
-
-
0041719056
-
-
1995.
-
D. V. Vender, W. W. Stoffels, E. Stoffels, G. M. W. Kroesen, and F. J. deHoog, "Charge-species profiles in electronegative radio-frequency plasmas," Phys. Rev. E, vol. 51, p. 2436, 1995.
-
W. W. Stoffels, E. Stoffels, G. M. W. Kroesen, and F. J. DeHoog, "Charge-species Profiles in Electronegative Radio-frequency Plasmas," Phys. Rev. E, Vol. 51, P. 2436
-
-
Vender, D.V.1
-
7
-
-
0027594170
-
-
1993.
-
V. A. Feoktistov, D. V. Lopaev, K. S. Klopovsky, A. M. Popov, O. B. Popovicheva, A. T. Rakhimov, and T. V. Rakhimova, "Low pressure RF discharge in electronegative gases for plasma processing," J. Nucl. Mater, vol. 200, p. 309, 1993.
-
D. V. Lopaev, K. S. Klopovsky, A. M. Popov, O. B. Popovicheva, A. T. Rakhimov, and T. V. Rakhimova, "Low Pressure RF Discharge in Electronegative Gases for Plasma Processing," J. Nucl. Mater, Vol. 200, P. 309
-
-
Feoktistov, V.A.1
-
8
-
-
0024071208
-
-
1998.
-
C. M. Ferreira, G. Gousset, and M. Touzeau, J. Phys. D, Appl. Phys., vol. 21, p. 1403, 1998.
-
G. Gousset, and M. Touzeau, J. Phys. D, Appl. Phys., Vol. 21, P. 1403
-
-
Ferreira, C.M.1
-
9
-
-
0001398338
-
-
1994.
-
A. J. Lichtenberg, V. Vahedi, and M. A. Lieberman, "Modeling electronegative plasma discharges," J. Appl. Phys., vol. 75, p. 2339, 1994.
-
V. Vahedi, and M. A. Lieberman, "Modeling Electronegative Plasma Discharges," J. Appl. Phys., Vol. 75, P. 2339
-
-
Lichtenberg, A.J.1
-
10
-
-
0030282558
-
-
1996.
-
I. G. Kouznetsov, A. J. Lichtenberg, and M. A. Lieberman, "Modeling electronegative discharges at low pressure," Plasma Sourc. Sci. Technol., vol. 5, p. 662, 1996.
-
A. J. Lichtenberg, and M. A. Lieberman, "Modeling Electronegative Discharges at Low Pressure," Plasma Sourc. Sci. Technol., Vol. 5, P. 662
-
-
Kouznetsov, I.G.1
-
11
-
-
0031119383
-
-
1997.
-
M. Shibata, N. Nakano, and T. Makabe, "The effects of laser-induced photodetachment in U2 rf discharge," J. Phys. D, Appl. Phys., vol. 30, p. 1219, 1997.
-
N. Nakano, and T. Makabe, "The Effects of Laser-induced Photodetachment in U2 Rf Discharge," J. Phys. D, Appl. Phys., Vol. 30, P. 1219
-
-
Shibata, M.1
-
12
-
-
0001333750
-
-
1998.
-
D. Hayashi and K. Kadota, "Measurements of negative ion density in high-density oxygen plasmas by probe-assisted laser photodetachment," J. Appl. Phys., vol. 83, p. 697, 1998.
-
"Measurements of Negative Ion Density in High-density Oxygen Plasmas by Probe-assisted Laser Photodetachment," J. Appl. Phys., Vol. 83, P. 697
-
-
Hayashi, D.1
Kadota, K.2
-
13
-
-
0029405713
-
-
1995.
-
M. Shibata, T. Makabe, and N. Nakano, Jpn. J. Appl. Phys., vol. 34, p. 6230, 1995.
-
T. Makabe, and N. Nakano, Jpn. J. Appl. Phys., Vol. 34, P. 6230
-
-
Shibata, M.1
-
14
-
-
0000708451
-
-
1996.
-
M. Shibata, N. Nakano, and T. Makabe, "Effects of O2(a1A9) on plasma structures in oxygen radio frequency discharges," J. Appl. Phys., vol. 80, no. 11, p. 6142, 1996.
-
N. Nakano, and T. Makabe, "Effects of O2(a1A9) on Plasma Structures in Oxygen Radio Frequency Discharges," J. Appl. Phys., Vol. 80, No. 11, P. 6142
-
-
Shibata, M.1
-
15
-
-
4444359019
-
-
1996.
-
V. V. Ivanov, K. S. Klopovsky, D. V. Lopaev, E. A. Muratov, A. T. Rakhimov, and T. V. Rakhimova, "Experimental investigation of nonlocality effects in the electron energy spectrum in an electronegative gas," JETF Lett., vol. 68, p. 537, 1996.
-
K. S. Klopovsky, D. V. Lopaev, E. A. Muratov, A. T. Rakhimov, and T. V. Rakhimova, "Experimental Investigation of Nonlocality Effects in the Electron Energy Spectrum in An Electronegative Gas," JETF Lett., Vol. 68, P. 537
-
-
Ivanov, V.V.1
-
16
-
-
33747345215
-
-
1996.
-
V. V. Ivanov, K. S. Klopovskiy, D. V. Lopaev, E. A. Muratov, A. T. Rakhimov, and T. V. Rakhimov, "The experimental and theoretical investigation of low pressure dc discharge in pure oxygen," in Abstracts of Ivated Lectures and Contributed Papers ESCAMPIG'96, Poprad Slovakia, part A, vol. 20E, p. 167, Aug. 27-30, 1996.
-
K. S. Klopovskiy, D. V. Lopaev, E. A. Muratov, A. T. Rakhimov, and T. V. Rakhimov, "The Experimental and Theoretical Investigation of Low Pressure Dc Discharge in Pure Oxygen," in Abstracts of Ivated Lectures and Contributed Papers ESCAMPIG'96, Poprad Slovakia, Part A, Vol. 20E, P. 167, Aug. 27-30
-
-
Ivanov, V.V.1
-
17
-
-
33747345217
-
-
1996.
-
V. V. Ivanov, K. S. Klopovskiy, D. V. Lopaev, E. A. Muratov, A. M. Popov, A. T. Rakhimov, and T. V. Rakhimova, "The experimental and theoretical investigation of nonlocality effects of electron energetic spectrum in oxygen glow discharge," in Abstracts of Ivated Lectures and Contributed Papers ESCAMPIG 96, Poprad Slovakia, part A, vol. 20E, p. 121, Aug. 27-30, 1996.
-
K. S. Klopovskiy, D. V. Lopaev, E. A. Muratov, A. M. Popov, A. T. Rakhimov, and T. V. Rakhimova, "The Experimental and Theoretical Investigation of Nonlocality Effects of Electron Energetic Spectrum in Oxygen Glow Discharge," in Abstracts of Ivated Lectures and Contributed Papers ESCAMPIG 96, Poprad Slovakia, Part A, Vol. 20E, P. 121, Aug. 27-30
-
-
Ivanov, V.V.1
-
18
-
-
76649100916
-
-
1995.
-
D. Pagnon, J. Amorim, J. Nahorny, M. Touzeau, and M. Vialle, "On the use of actinometry to measure the dissociation in U2 dc glow discharges: Determination of the wall recombination probability," J. Phys. D, Appl. Phys.. vol. 28, p. 1856, 1995.
-
J. Amorim, J. Nahorny, M. Touzeau, and M. Vialle, "On the Use of Actinometry to Measure the Dissociation in U2 Dc Glow Discharges: Determination of the Wall Recombination Probability," J. Phys. D, Appl. Phys.. Vol. 28, P. 1856
-
-
Pagnon, D.1
-
19
-
-
33747345218
-
-
1996.
-
V. V. Ivanov, K. S. Klopovskiy, D. V. Lopaev, A. T. Rakhimov, and T. V. Rakhimova, "Recombination of O(3P) atoms on the tube walls in oxygen dc discharge," in Abstracts of Invited Lectures and Contributed Papers ESCAMPIG'96, Poprad Slovakia, part A, vol. 20E, p. 77, Aug. 27-30, 1996.
-
K. S. Klopovskiy, D. V. Lopaev, A. T. Rakhimov, and T. V. Rakhimova, "Recombination of O(3P) Atoms on the Tube Walls in Oxygen Dc Discharge," in Abstracts of Invited Lectures and Contributed Papers ESCAMPIG'96, Poprad Slovakia, Part A, Vol. 20E, P. 77, Aug. 27-30
-
-
Ivanov, V.V.1
-
21
-
-
0000237087
-
-
1991.
-
M. Bacal, P. Berlemot, A. M. Bruneteau, R. Leroy, and R. A. Stern, "Measuerment of the H~ thermal energy in a volume ion source plasma," J. Appl. Phys., vol. 70, p. 1212, 1991.
-
P. Berlemot, A. M. Bruneteau, R. Leroy, and R. A. Stern, "Measuerment of the H~ Thermal Energy in A Volume Ion Source Plasma," J. Appl. Phys., Vol. 70, P. 1212
-
-
Bacal, M.1
-
22
-
-
0031557069
-
-
1997.
-
4 dc discharge at low pressure," J. Phys. D, Appl. Phys., vol. 30, p. 423, 1997.
-
4 Dc Discharge at Low Pressure," J. Phys. D, Appl. Phys., Vol. 30, P. 423
-
-
Feoktistov, V.A.1
-
25
-
-
33747370531
-
-
1991.
-
Physical Values, I. S. Grigoyev and E. Z. Meylokhov, Eds., Energatomizdat, Moscow, Russia, 1991.
-
I. S. Grigoyev and E. Z. Meylokhov, Eds., Energatomizdat, Moscow, Russia
-
-
Values, P.1
-
26
-
-
33747345219
-
-
1995.
-
V. V. Ivanov, A. M. Popov, and T. V. Rakhimova, "New approach to the particle-in-cell method for simulation of low-pressure RF discharge," Plasma Phys. Rep., vol. 21, p. 692, 1995.
-
A. M. Popov, and T. V. Rakhimova, "New Approach to the Particle-in-cell Method for Simulation of Low-pressure RF Discharge," Plasma Phys. Rep., Vol. 21, P. 692
-
-
Ivanov, V.V.1
-
27
-
-
33747365149
-
-
vol. 14.
-
A. Kh. Mnatsakanian and G. V. Naidis, Plasma Chemistry, B. M. Smirnov, Ed. Moscow, Russia: Energoatomizdat, 1987, vol. 14.
-
Plasma Chemistry, B. M. Smirnov, Ed. Moscow, Russia: Energoatomizdat, 1987
-
-
Kh Mnatsakanian, A.1
Naidis, G.V.2
-
28
-
-
0004705596
-
-
1973.
-
B. C. O'Neil and J. D. Craggs, "Collisional detachment of electrons and ion molecule reactions in oxygen," J. Phys. B, Atom. Molec. Phys., vol. 6, p. 2625, 1973.
-
"Collisional Detachment of Electrons and Ion Molecule Reactions in Oxygen," J. Phys. B, Atom. Molec. Phys., Vol. 6, P. 2625
-
-
O'Neil, B.C.1
Craggs, J.D.2
|