Comparing hardness and wear data for tetrahedral amorphous carbon and hydrogenated amorphous carbon thin films

Wear

Volumn 257, Issue 5-6, 2004, Pages 509-522

  Lemoine, P ^a   Quinn, J P ^a   Maguire, P ^a   McLaughlin, J A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

Amorphous carbon; Critical load; Hardness; Wear

Indexed keywords

ADHESION; AMORPHOUS MATERIALS; CERAMIC MATERIALS; COMPRESSIVE STRESS; HARDNESS; LUMINESCENCE; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES; WEAR RESISTANCE;

AMORPHOUS CARBONS; CRITICAL LOADS;

WEAR OF MATERIALS;

FILM; HARDNESS; WEAR;

EID: 3242719769     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2004.01.010     Document Type: Article

References (63)

1. Endler I.Bartsch K.Leonhardt A.Scheibe H.-J.Ziegele H.Fuchs I.Raatz Ch.Preparation and wear behaviour of woodworking tools coated with superhard layers Diam. Relat. Mater. 8 1999 834-839
2. Bhushan B.Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments Diam. Relat. Mater. 8 1999 1985-2015
3. Murakawa M.Koga N.Watanabe S.Takeuchi S.Tribological behaviour of amorphous hard carbon films against zinc-plated steel sheets Surf. Coat. Technol. 108/109 1998 425-430
4. Grill A.Diamond-like carbon coatings as biocompatible materials--an overview Diam. Relat. Mater. 12 2003 166-170
5. Kleinsorge B.Rodil S.E.Adamopoulos G.Robertson J.Grambole D.Fukarek W.Hydrogen and disorder in diamond-like carbon Diam. Relat. Mater. 10 2001 965-969
6. 3 bonding in diamond-like carbon? Diam. Relat. Mater. 11 2002 994-999
7. McKenzie D.R.Muller D.Pailthorpe D.A.Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon Phys. Rev. Lett. 67 1991 773-776
8. Yamamoto T.Hyodo H.Amorphous carbon overcoat for thin-film disk Tribol. Int. 36 2003 483-487
9. Scott W.W.Bhushan B.Corrosion and wear studies of uncoated and ultra-thin DLC coated magnetic tape-write heads and magnetic tapes Wear 243 2000 31-42
10. Gioti M.Logothetidis S.Charitidis C.Panayiotatos Y.Varsano I.On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems Sens. Actuators A 99 2002 35-40
11. Gupta B.K.Bhushan B.Mechanical and tribological properties of hard carbon coatings for magnetic recording heads Wear 190 1995 110-122
12. Gupta B.K.Bhushan B.Micromechanical properties of amorphous carbon coatings deposited by different deposition techniques Thin Solid Films 270 1995 391-398
13. 3 bonding in diamond-like carbon Diam. Relat. Mater. 2 1993 984-989
14. 3:TiC substrates-a confocal micro-Raman study Thin Solid Films 357 1999 159-165
15. Fourches N.Turban G.Grolleau B.Study of DLC/silicon interfaces by XPS and in-situ ellipsometry Appl. Surf. Sci. 68 1993 149-160
16. Ferrari A.C.Robertson J.Interpretation of Raman spectra of disordered carbon Phys. Rev. B 6120 2000 14095-14107
17. 3-TiC substrates Thin Solid Film 379 2000 166-172
18. Oliver W.C.Pharr G.M.An improved technique for determining hardness and Young's modulus using load and displacement sensing indentation experiments J. Mater. Res. 76 1992 1564
19. Liu E.Shi X.Tan H.S.Cheah L.K.Sun Z.Tay B.K.Shi J.R.The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc Surf. Coat. Technol. 120/121 1999 601-606
20. Lemoine P.Lamberton R.W.Ogwu A.A.Zhao J.F.Maguire P.McLaughlin J.Complementary analysis techniques for the morphological study of ultra-thin amorphous carbon films J. Appl. Phys. 86 1999 6564-6570
21. Ronkainen H.Varjus S.Koskinen J.Holmberg K.Differentiating the tribological performance of hydrogenated and hydrogen-free DLC coatings Wear 249 2001 260-266
22. Li X.Bhushan B.Takashima K.Baek C.W.Kim Y.K.Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques Ultramicroscopy 97 2003 481-494
23. Ferrari A.C.Determination of bonding in diamond-like carbon by Raman spectroscopy Diam. Relat. Mater. 11 2002 1053-1061
24. Marchon B.Gui J.Grannen K.Rauch G.C.Ager J.W.Silva S.R.P.Photoluminescence and Raman spectroscopy in hydrogenated amorphous carbon films IEEE Trans. Magn. 33 1997 3148-3150
25. 3 composition Diam. Relat. Mater. 5 1996 433-438
26. 3 coatings Scripta Materiala 48 2003 1099-1104
27. Jankowiak R.Roberts K.Tomasik P.Sikora M.Small G.J.Schilling C.H.Probing the crystalline environment of alpha-alumina via luminescence of metal ion impurities: an optical method of ceramic flaw detection Mater. Sci. Eng. A 281 2000 45-55
28. Scharf T.W.Singer I.L.Thickness of diamond-like carbon coatings quantified with Raman spectroscopy Thin Solid Films 440 2003 138-144
29. Sanchez-Lopez J.C.Donnet C.Loubet J.L.Belin M.Grill A.Patel V.Jahne C.Tribological and mechanical properties of diamond-like carbon prepared by high-density plasma Diam. Relat. Mater. 10 2001 1063-1069
30. Martínez E.Andújar J.L.Polo M.C.Esteve J.Robertson J.Milne W.I.Study of the mechanical properties of tetrahedral amorphous carbon films by nanoindentation and nanowear measurements Diam. Relat. Mater. 10 2001 145-152
31. Cheah L.K.Shi X.Tay B.K.Liu E.Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition Surf. Coat. Technol. 105 1998 91-96
32. Shi X.Tay B.K.Tan H.S.Zhong L.Tu Y.Q.Silva S.R.P.Milne W.J.Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy J. Appl. Phys. 79 1996 7234-7240
33. Hutchinson J.W.Plasticity at the micron scale Int. J. Sol. Struct. 37 2000 225-238
34. Zhao M.Slaughter W.S.Li M.Mao S.X.Material-length-scale-controlled nanoindentation size effects due to strain-gradient plasticity Acta Mater. 51 2003 4461-4469
35. Knapp J.A.Follstaedt D.M.Myers S.M.Barbour J.C.Friedman T.A.Finite-element modeling of nanoindentation J. Appl. Phys. 853 1999 1460-1474
36. S. Veprek, S. Mukherjee, P. Karvankova, H.-D. Mannling, J.L. He, K. Moto, J. Prochazka, A.S. Argon, Hertzian analysis of the self-consistency and reliability of the indentation hardness measurements on superhard nanocomposite coatings, Thin Solid Films 436 (2003) 220-231.
37. X. Shi, Private communication.
38. Tomasella E.Thomas L.Meunier C.Nadal M.Mikhailov S.Coupled effects of bombarding ions energy on the microstructure and stress level of RF-PECVD a-C:H films: correlation with Raman spectroscopy Surf. Coat. Technol. 174/175 2003 360-364
39. Uglovaa V.V.Anishchika V.M.Pauleaub Y.Kuleshova A.K.Thiery F.Pelletier J.Dub S.N.Rusalsky D.P.Relations between deposition conditions, microstructure and mechanical properties of amorphous carbon-metal films Vacuum 70 2003 181-185
40. Leyland A.Matthews A.On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour Wear 246 2000 1-11
41. Greenwood J.A.Williamson J.B.P.Contact of nominally flat surfaces Proc. R. Soc. London, Ser. A 295 1966 300-319
42. Svahn F.Kassman-Rudolphi Å.Wallén E.The influence of surface roughness on friction and wear of machine element coatings Wear 254 2003 1092-1098
43. Sheeja D.Tay B.K.Lau S.P.Shi X.Ding X.Structural and tribological characterization of multilayer ta-C films prepared by filtered cathodic vacuum arc with substrate pulse biasing Surf. Coat. Technol. 132 2000 228-232
44. Li K.Y.Zhou Z.F.Chan C.Y.Bello I.Lee C.S.Lee S.T.Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process Diam. Relat. Mater. 10 2001 1855-1861
45. Stanford M.K.Jain V.K.Friction and wear characteristics of hard coatings Wear 251 2001 990-996
46. Kennedy F.E.Lidhagen D.Erdemir A.Woodford J.B.Kato T.Tribological behavior of hard carbon coatings on steel substrates Wear 255 2003 854-858
47. Bai M.Kato K.Umeharaa N.Miyakeb Y.Xu J.Tokisuec H.Scratch-wear resistance of nanoscale super thin carbon nitride overcoat evaluated by AFM with a diamond tip Surf. Coat. Technol. 126 2000 181-194
48. I.M. Hutching, Tribology, Friction and Wear of Engineering Materials, Arnold, London, 1992, p. 143.
49. Lemoine P.Zhao J.F.Quinn J.P.Ogwu A.A.McLaughlin J.A.Maguire P.McGinnity F.Shi X.Nanoindentation and scratch resistance testing on magnetic tape heads coated with ultra-thin amorphous carbon layers Wear 244 2000 79-84
50. Liu D.Benstetter G.Frammelsberger W.The effect of the surface layer of tetrahedral amorphous carbon films on their tribological and electron emission properties investigated by atomic force microscopy Appl. Phys. Lett. 8222 2003 3890-3898
51. Andersson J.Erck R.A.Erdemir A.Friction of diamond-like carbon films in different atmospheres Wear 254 2003 1070-1075
52. I.M. Hutching, Tribology, Friction and Wear of Engineering Materials, Arnold, London, 1992, p. 50.
53. B. Bhushan, Handbook of MicroNanotribology, 2nd ed., CRC Press, Boca Raton, FL, 1999.
54. Martinez E.Polio M.C.Pascual E.Esteve J.Substrate temperature effects on the microhardness and adhesion of diamond-like thin films Diam. Relat. Mater. 8 1999 563-566
55. Li X.Bhushan B.Micromechanical and tribological characterization of hard amorphous carbon coatings as thin as 5 nm for magnetic recording heads Wear 220 1998 51-58
56. Lemoine P.Zhao J.F.Bell A.Maguire P.McLaughlin J.Intrinsic stress measured on ultra-thin amorphous carbon films deposited on AFM cantilevers Diam. Relat. Mater. 10 2001 94-98
57. Park H.S.Kwon D.An energy approach to quantification of adhesion strength from critical loads in scratch tests Thin Solid Films 307 1997 156-162
58. I.M. Hutching, Tribology, Arnold, London, 1992, p. 151.
59. Friedmann T.A.Sullivan J.P.Knapp J.A.Tallant D.R.Follstaedt D.M.Medlin D.L.Mirkarimi P.B.Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond Appl. Phys. Lett. 7126 1997 3820-3822
60. Sheeja D.Tay B.K.Yu L.J.Lau S.P.Sze J.Y.Cheong C.K.Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasing Thin Solid Films 420/421 2002 62-69
61. Rossberg D.Optical properties of the integrated infrared sensor Sens. Actuators A 54 1996 793-797
62. Sourty E.Wild M.Sullivan J.L.Pole tip recession and staining at the head to tape interface of linear tape recording systems Wear 252 2002 276-299
63. Jakob W.Surface reactions during growth and erosion of hydrocarbon films Thin Solid Films 326 1998 1-42