Wear effect on microstructure of DLC films PECVD-deposited on Al2O3:TiC substrates - a confocal micro-Raman study

Thin Solid Films

Volumn 357, Issue 2, 1999, Pages 159-165

  Zhao, Jun Fu ^a   Liu, Zhi Hui ^b   McLaughlin, James ^a  

^a Univ U   (United Kingdom)

^b INSTITUTE FOR RESEARCH IN IMMUNOLOGY AND CANCER   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BAND STRUCTURE; CARBON; CRYSTAL MICROSTRUCTURE; FRICTION; GRAPHITIZATION; HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SUBSTRATES; TITANIUM CARBIDE; WEAR RESISTANCE;

CONFOCAL MICRO-RAMAN SPECTROSCOPY; RAMAN MAPPING;

AMORPHOUS FILMS;

EID: 0033317044     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00656-2     Document Type: Article

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